摘要
Cryopumps have large pumping speed and can pump many types of gases.As the main pump of the vacuum system in Heavy Ion Research Facility in Lanzhou(HIRFL),they are used to maintain the long-term operation of large vacuum systems such as Sector Focusing Cyclotron(SFC),Separates Sector Cyclotron(SSC),SSC-Linac[1,2].
