TiCN涂层的制备及其微观结构和性能

Preparation of TiCN coating and its microstructure and properties

采用直流磁控溅射法在AZ31镁合金上制备了TiCN涂层。采用X射线荧光光谱仪、扫描电镜和X射线衍射仪表征了涂层的化学成分、表面形貌和物相,并采用电化学阻抗谱、浸泡试验、显微硬度测试和磨损试验考察了基体偏压(−40、−60和−80 V)对涂层性能的影响。结果表明,涂层由TiCN和TiN组成。随着负偏压增大,涂层中Ti、C元素含量增加,N元素含量减小,而显微硬度提高,物相组成和择优取向发生变化。−60 V偏压下所制涂层的表面粗糙度最小,耐蚀性最好。3种偏压下所制涂层的摩擦因数均小于0.3,磨损率在10−6 mm3/(N·m)数量级。

TiCN coatings were prepared on AZ31 Mg alloy by direct-current magnetron sputtering.Their chemical composition,surface morphology,and crystalline structure were characterized by X-ray fluorescence spectrometry,scanning electron microscopy,and X-ray diffractometry,and the effects on different biases(−40,−60,and−80 V)on their properties were studied by electrochemical impedance spectroscopy,immersion testing,microhardness testing,and wear testing.The results showed that the coatings are composed of TiCN and TiN.With the increasing of negative bias,the Ti and C contents of coating increase,the N content decreases,the microhardness increases,and the phase constitution and preferred orientation change.The coating prepared under−60 V bias has the smallest surface roughness and the best corrosion resistance.The coatings prepared under different biases had a friction factor less than 0.3 and a wear loss rate in the order of 10−6 mm3/(N·m).