基于MEMS工艺的微型制冷器

Micro-coolers Based on MEMS Technology

微机电系统MEMS(micro-electro-mechanical system)是一种集合了微电子与机械工程技术的新型高科技装置,其制造工艺可以进行最小至纳米尺度的加工以及高度集成化的微型制造。其产品微小体积、高度集成化以及高性能高产热的特性也决定了其需要匹配相应的制冷解决方案,本文重点阐述了基于MEMS制造工艺并同时应用于MEMS产品的微型制冷器的工作原理、性能及发展趋势。分别分析了微型半导体制冷器以及微型节流制冷器各自的优势和不足,对微型制冷器的未来发展提出了建议。

Micro-electro-mechanical systems(MEMS)are a new type of high-tech devices that combine microelectronics and mechanical engineering technology.Their manufacturing process can be highly integrated and conducted at the minimum nanometer scale.MEMS products also require corresponding refrigeration solutions because of their small volume,high integration,high performance,and high heat production.This study focuses on micro-semiconductors and Joule–Thomson(JT)coolers fabricated via MEMS technology that can also be applied to MEMS products.The working principles,performance,and development trends of the micro-coolers are discussed,and the advantages and disadvantages of micro-semiconductors and JT coolers are analyzed,respectively.Additionally,certain suggestions regarding the future development of micro-coolers are provided。