用于微位移测量的迈克尔逊激光干涉仪综述

Review of Michelson Laser Interferometer for Micro Displacement Measurement

迈克尔逊干涉术测量微位移可实现纳米甚至更高的分辨力,并且具备能直接溯源至激光波长等诸多优点,是目前微位移测量的重要技术手段。以限制迈克尔逊干涉仪品质提高的非线性误差为主要切入点,对目前各种基于迈克尔逊干涉原理的激光干涉技术进行了分类介绍,主要讨论了微位移测量中实现高精度和高分辨率的干涉测量技术,最后展望了激光干涉法测量微位移的近期发展趋势。

Michelson interferometry can achieve nanometer or even higher resolution,and can be directly traced to laser wavelength and many other advantages. It is an important technical measure of micro displacement measurement at present. Aiming at various laser interferometric techniques based on Michelson interferometer principle are classified and introduced. The interferometric measurement techniques to achieve sub-nanometer accuracy and resolution in microdisplacement measurement are mainly discussed. Finally,the development trend of laser micro displacement measurement is prosected in future.