光功率热分析仪的温度校准方法研究

Temperature Calibration Method of Optical Power Thermal Analyzer

薄膜材料相变温度的准确测量是相变材料的应用关键。光功率热分析仪是基于薄膜材料相变前后光反射率发生突变的原理测量相变温度的新型仪器,采用真空红外加热方式达到相变温度。为了测量得到准确可靠的相变温度,通过对光功率热分析仪测量相变温度方式、标准热电偶原位校准仪器测温热电偶方法的研究,实现将相变温度溯源至SI单位,并且对在测温区间100~1 000℃内的温度进行了不确定度评定,得到校准拟合公式,相关系数为0.999 7。

The accurate measurement of phase change temperature of thin film materials is the key to application of phase change materials. The optical power thermal analyzer( OPA) is a new apparatus to measure the phase change temperature of thin film materials. The mechanism of OPA is that the optical reflectivity of thin films will change dramatically after the phase change. The OPA reaches the phase change temperature of thin films by infrared heating in vacuum conditions. The temperature measurement method of OPA and in situ temperature calibration by standard thermocouple were studied for accurate measurement of phase change temperature,which was traced to SI unit. The temperature of uncertainty in the range of 100 ℃ to 1 000 ℃ were evaluated. The calibration fitting formula was obtained,the correlation coefficient is 0. 999 7.