径向微型分子泵结构设计及抽气性能仿真

Structural design of radial micro molecular pump and simulation of its pumping performance

微型分子泵用于航天器上微小型探测仪器的高真空环境获得。着眼于简化结构,减小体积与装配难度,面向径向微型分子泵,针对其核心部件——定转子进行结构设计,并利用ANSYS、COMSOL软件作仿真分析,探究定转子径向结构、叶片角度、节弦比等对泵抽气性能的影响;比较径向与轴向分子泵的抽气效果。结果表明,在同等抽气系统体积下,径向微型分子泵在获得高压缩比方面更具优势。

The micro molecular pump is used to achieve a high-vacuum acquisition for spacecraft micro and small detection devices.To simplify the structure of the pump and reduce the volume and the assembling difficulty,a radial micro molecular pump is studied in this paper.The structural design of the core components of the radial micro molecular pump is discussed in detail.The ANSYS and the COMSOL are used to simulate and analyze the influence of the radial structure,the blade angle,and the gap-chord ratio of the stator and the rotor on the pumping performance.The comparison between the radial and the axial molecular pumps shows that the radial pumps can achieve a higher compression ratio with a same extraction volume.