微机电系统二维微动工作台微位移机构特性研究

Research on Property of Two Dimension Micro-Displacements Mechanism in Micro-Displacements Worktable Applied to MEMS

结合电致伸缩陶瓷驱动器和杠杆柔性铰链机构,论述了二维微动工作台微位移机构的设计,建立了微位移机构的机电耦合模型。分析了机构的暂态响应和稳态响应及其影响因素,为微动工作台系统设计、改善微位移机构的响应速度以及控制系统参数的确定提供了理论依据。

This paper introduced the design of two dimension microdisplacements worktable composed of electrostrictive ceramics drivers and lever flexible hinge joint mechanisms.The electromechanical coupling model of this microdisplacements mechanism has been built.The paper gives emphasis to the analysis of the transitional response,steady state response and their affect factors.Some suggestions have been made on microdisplacements worktable system design,improving the speed of response and evaluating the control system parameters.\;