液相外延设备温度控制系统研究

Research on Temperature Control System of LPE Equipment

水平液相外延设备是目前生产碲镉汞薄膜材料的主要设备,其温度控制的精度、温度场的均匀性等是设备的关键性能指标。为了满足液相外延设备对温度控制的要求,设计了多段独立控制的加热系统,并采用串级控温方式对炉体中反应管内温度进行精准控制;通过在不同加热阶段对串级参数进行动态调整,提升反应管内温度的动态跟随性能;开发了设备控制软件并对温度控制性能进行了测试。结果表明,该温度控制系统可以满足不同加热阶段的不同功率要求,温度控制的精度、恒温区均匀性以及动态跟随性能等均符合工艺技术要求,并在液相外延设备上成功应用。

Horizontal liquid phase epitaxy(HLPE)equipment is the main equipment for the production of HgCdTe thin films.The accuracy of temperature control and the uniformity of temperature field are the key performance indexes of the equipment.In order to meet the temperature control requirements of LPE equipment,a multi-stage independent control heating system is designed,and the cascade temperature control method is adopted to accurately control the reactor internal temperature in the furnace,the dynamic following performance of the reactor internal temperature is improved by dynamically adjusting the cascade parameters in different heating stages.The equipment control software is developed and the temperature control performance is tested.The results show that the temperature control system can meet the different power requirements of different heating stages,the accuracy of temperature control,the uniformity of constant temperature region and the dynamic following performance meet the technical requirements.It has been successfully applied in LPE equipment.