摘要
对低温探针台液氮管路的保冷结构进行了研究,给出了保冷层厚度的计算方法,应用有限元分析软件对液氮管路进行了热应力分析,为低温探针台液氮管路保冷设计提供了理论依据。
The insulation structure for liquid nitrogen pipelines of cryogenic probe station is studied,a calculation method for insulation layer thickness is given,and the stress on liquid nitrogen pipelines is analyzed using FEA(Finite Element Analysis)software,the results could provide theoretical evidence for insulation design on liquid nitrogen pipelines of cryogenic probe station.
作者
贾月明
刘路宽
高岳
JIA Yueming;LIU Lukuan;GAO Yue(The 45^(th)Research Institute of CETC,Beijing 100176,China)
出处
《电子工业专用设备》
2021年第1期12-14,70,共4页
Equipment for Electronic Products Manufacturing
关键词
低温探针台
液氮管路
保冷设计
应力分析
Cryogenic probe station
Liquid nitrogen pipelines
Insulation design
Stress analysis
