摘要
介绍了一种用于超声波扫描显微镜的自动上下片系统设计,对其真空气路、循环水路和S型导轨的机械结构设计进行了详细介绍。基于贝加莱PLC的输入/输出信号控制系统、X2X Link通讯方式下运动控制系统硬件,在贝加莱Automation Studio开发环境下进行的仿真测试,给出了三环整定参数优化和人机界面的设计方法。
A kind of automatic loading and unloading system design is introduced in this paper for scanning acoustic microscope,and also providing the design of the vacuum path,circulating water path and S-shaped guide rail mechanical structure of the system in detail.The input and output signal control system based on B&R PLC is introduced,and the hardware composition of the motion control system under the X2X Link communication mode is introduced.The simulation test is performed in the B&R Automation Studio development environment,and the three-loop setting parameters are given.
作者
赵英伟
郝晓亮
张文朋
ZHAO Yingwei;HAO Xiaoliang;ZHANG Wenpeng(The 13^(th)Research Institute of CETC,Shijiazhuang 050051,China)
出处
《电子工业专用设备》
2021年第1期34-37,共4页
Equipment for Electronic Products Manufacturing
