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金属氧化物半导体气体传感器应用现状和发展情况 被引量:6

The Application of Metal Oxide Semiconductor Gas Sensors and Their Development
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摘要 金属氧化物气体传感器在社会经济发展中具有不可代替的重要作用,是各国研究者重点关注对象之一.目前,对金属氧化物气敏性能改善的研究主要集中在化学组分优化和微观结构优化设计两个方向,并制备出了具有各种微观结构形貌的气敏性能良好的新型金属氧化物基半导体材料.但能在低温、常温工作的高性能金属氧化物气敏材料仍不能满足应用需求,这给科研工作者们带来极大的挑战和机遇. Metal oxide gas sensors are one of the issues of concern all over the world due to their irreplaceable role in social and economic development.At present,the researches on the improvement of the sensing properties of metal oxides mainly focus on the optimization of chemical composition and microstructure.Although new types of metal oxide-based semiconducting materials with various morphologies and excellent sensitivity have been prepared,the current gas sensitive metal oxide materials with high property that can work at low or normal temperatures still cannot satisfy the application requirements,thus bringing great challenges and opportunities to researchers.
作者 陈祥铭 杨贵钦 赵海茹 涂晔 CHEN Xiangming;YANG Guiqin;ZHAN Hairu;TU Ye(School of Physics and Electronic Engineering,Yuxi Normal University,Yuxi,Yunnan 653100)
出处 《玉溪师范学院学报》 2020年第6期57-64,共8页 Journal of Yuxi Normal University
关键词 金属氧化物半导体 气体传感器 传感器 性能研究 metal oxide semiconductor gas sensor sensor performance research
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