原料粉特征对ITO靶材微观结构的影响

Effect of Raw Powder on the Microstructure of ITO Target

以ITO气化粉和进口湿法粉作为原始粉,在相同的工艺条件下,制备出ITO靶材,对比研究了两种不同原始粉对烧结后靶材微观结构的影响,结果表明:当在0.6 MPa氧气氛,1 530、1 550℃保温20 h条件下烧结,湿法粉和气化粉靶材密度均较高且差异很小,靶材晶粒尺寸基本相当,气化粉靶材晶内小微粒尺寸较湿法粉小,但小微粒聚集程度高于湿法粉靶材;当在常压氧气氛、1 550℃保温20 h条件下烧结,湿法粉靶材密度高于气化粉的,靶材晶粒尺寸基本相当,存在个别较大晶粒,湿法粉靶材已致密,而气化粉靶材未完全致密化,二者晶内小微粒形貌和尺寸差异仍比较明显,气化粉靶材晶内单独的小微粒尺寸同样较湿法粉的小,但聚集程度仍高于湿法粉的.

ITO targets were prepared under the same technological conditions with gasified ITO powders and co-precipitated powders,respectively.The effect of two different kinds of raw powders on the microstructure of ITO target was comparatively studied.The result shows that when the ITO targets are sintered at 1550℃/1530℃for 20 hours in 0.6 MPa oxygen atmosphere,the densities of the two kinds of targets are at same high level and the grain sizes are basically equal,the sizes of the intragranular microparticles in target prepared by gasified powders are smaller than those prepared by co-precipitated powders,but the degree of aggregation of microparticles in the former is higher than that in the latter.When the ITO target is sintered at 1550℃for 20 hours in normal oxygen atmosphere,the density of the target prepared by co-precipitated powders is higher that prepared by gasified powders while the grain sizes of the two kinds of targets which contain a few large grains are basically equal.The former is completely dense while the latter is not.The sizes of the intragranular microparticles in target prepared by gasified powders are smaller than those prepared by co-precipitated powders and the degree of aggregation of microparticles in the former is higher than that in the latter.