Elden公式法在双频激光干涉仪测量系统的应用

Application of Elden Formula Method in Ddual-Frequency Laser Interferometer Measurement System

双频激光干涉仪测量系统是以激光波长为测量基准,在空气中传播的激光波长会受到空气折射率变化影响,分析了现有的激光波长补偿方法,重点对间接补偿法中的Edlen公式法进行了研究。搭建了一套双频激光干涉仪测量的实验平台,并对不同光程下实验平台的稳定性进行了测试,结果表明:实验平台的测量值能达到m量级,具有较好的稳定性。采用高精度的温度传感器和压力传感器实时测量环境参数,完成Edlen公式法的补偿实验,实验结果表明:当存在一定外界环境影响时,Edlen公式法的纳米级测量补偿效果能提升10-10m量级;在实际应用中的微米级环境测量情况下时,补偿效果能提升10^(-8)m量级。

The measurement system of dual frequency laser interferometer is based on the laser wavelength.The wavelength of laser propagating in the air will be affected by the change of air refractive index.This paper analyzes the existing laser wavelength compensation methods,and focuses on the Edlen formula method of indirect compensation method.A set of experimental platform measured by dual-frequency laser interferometer is built,and the stability of the experimental platform is tested under different optical paths.The results show that the measured values of the experimental platform can reach the magnitude of m and have good stability.High precision temperature sensor and pressure sensor are used to measure environmental parameters in real time,and the compensation experiment of Edlen formula method is completed.The experimental results show that when there is certain external environment influence,the compensation effect of Edlen formula method in nano measurement can be improved by order;in the actual application of micron level environmental measurement,the compensation effect can be improved by order.