拉曼光谱仪在基板玻璃表面污染物分析中的应用研究

Application of Raman Spectrometer in Analysis of Pollutants on the Surface of Substrate Glass

为分析对策基板玻璃制造后加工过程中的表面污染问题,提升产线良率,需要对表面污染物进行形貌、成分分析。对污染样品取样,用光学显微镜进行外观形貌观察,用拉曼光谱仪进行污染物成分分析,然后进一步分析其来源,采取针对性的对策。实践表明:使用拉曼光谱仪在对基板玻璃表面污染物成分分析方面效果显著,能满足产线对表面污染物的分析要求。

In order to analyze the problem of surface pollution in the processing of substrate glass after manufacturing and improve the yield of production line,it is necessary to analyze the morphology and composition of surface pollutants.First of all,we should sample the contaminated samples,observe the appearance with optical microscope,analyze the components of pollutants with Raman spectrometer,then further analyze their sources and take targeted countermeasures.Practice shows that Raman spectrometer is effective in the analysis of pollutants on the surface of substrate glass,and can meet the requirements of production line for the analysis of pollutants on the surface.