阻抗分析仪转接夹具补偿算法研究

Research on Compensation Algorithm of the Transfer Fixture for Impedance Analyzer

利用阻抗分析仪测量元件阻抗时,有时需要使用转接夹具,通常做法是先进行开路/短路校准后再测量元件阻抗,但这种方法在频率高于1 MHz时误差较大。因此,提出了用ABCD矩阵建立转接夹具补偿算法模型,并推算出采用开路/短路/标准负载校准的误差计算公式。对1Ω~10 kΩ的多个四端对高频电阻标准器的测试表明,修正后结果与参考值的差异在0.00%~1.4%,优于开路/短路校准后直接测量的0.01%~4.2%。

When measuring the impedance of a component with an impedance analyzer,it is sometimes recessary to use a transfer fixture.The usual practice is to calibrate the component first and then measure the impedance of the component,but this method has a larger error when the frequency is higher than 1 MHz.Therefore,a ABCD matrix is used to establish the compensation algorithm model of transfer fixture,and the error calculation formula of open circuit/short circuit/standard load calibration is calculated.The test of multiple four ends of 1Ω~10 kΩfor high frequency resistance standard device shows that the difference between the modified result and the reference value is between 0.00%~1.4%,which is better than the 0.01%~4.2%measured directly after open/short calibration.