薄膜材料相变温度测量方法介绍

Introduction of Phase Transition Temperature Measurement Method for Thin Film Materials

探究了基于不同原理(变温X射线衍射法、热分析法和光功率分析法)的相变温度的测量方法,并从测量机理上对测温方式进行了分析,最后讨论了不同测量方法的优劣及影响这些测温方法测量精度的因素。有助于揭示薄膜材料相变过程中物理化学性质的变化,为薄膜器件组装过程中的稳定性和质量可控性提供技术支撑。

This paper explores the measurement methods of phase transition temperature based on different principles(variable temperature X-ray diffraction method,thermal analysis method,and optical power analysis method),and analyzes the temperature measurement methods in terms of measurement mechanism,and finally discusses the advantages and disadvantages of different measurement methods and the factors affecting the measurement accuracy of these measurement methods.It helps to reveal the changes of physicochemical properties during the phase transition of thin film materials,and provides technical support for the stability and quality controllability during the assembly of thin film devices.