C/C复合材料表面金属Ti/TiO_(2)/Pt薄膜的制备及研究

Study on Technology of Preparing Ti/TiO_(2)/Pt Film on Surface of C/C Composite

C/C复合材料具有化学性质稳定、热膨胀系数低以及优良的高温稳定性。因此C/C复合材料是制备低红外发射率薄膜的理想基体材料。本文通过改变参数,探究了薄膜厚度、真空热处理温度对薄膜表面形貌、附着力、物相组成、红外发射率等性能的影响。研究发现:当Ti薄膜厚度为1.06μm,真空热处理温度为1000℃时,经过320℃/5 h氧化处理后制备的Ti/TiO_(2)/Pt薄膜综合性能最好。该工艺制备的Ti/TiO_(2)/Pt表面较为光滑,粗糙度较小,3~5μm和8~14μm波段的红外发射率分别能达到0.061和0.065,附着力为7.344 MPa。

C/C composites have stable chemical properties,low coefficient of thermal expansion and excellent high temperature stability properties.Therefore,C/C composites are ideal matrix materials for preparing low infrared emissivity films.By changing the parameters,the effects of film thickness and vacuum heat treatment temperature on the surface morphology,adhesion,phase composition and infrared emissivity of Ti/TiO_(2)/Pt films was investigated.The study found that when the thickness of Ti film was 1.06μm and the vacuum heat treatment temperature was 1000℃,the comprehensive properties of Ti/TiO_(2)/Pt film prepared by oxidation at 320℃/5 h were the best.The surface of Ti/TiO_(2)/Pt prepared by this process was smooth and its roughness was small.The infrared emissivity of 3~5μm and 8~14μm bands can reach 0.061 and 0.065 respectively,and the adhesion was 7.344 MPa.