磁控溅射功率对电子元件表面Co/CeO_(2)组织和电磁学性能的影响

Effect of Magnetron Sputtering Power on Microstructure and Electromagnetic Properties of Co/CeO_(2)on Electronic Components

为了提高电子元件表面CeO_(2)涂层的电磁学性能,通过设置不同功率Co金属靶的方式获得不同Co含量(原子分数)的Co/CeO_(2)复合涂层。采用试验测试的方式研究了其组织和电磁学性能。结果表明:逐渐增大Co含量后,涂层生长速率呈现线性上升,形成了具有六方晶格特征的Co不同晶面衍射峰,衍射峰的宽度也随之降低,强度明显提高。在涂层的表面区域存在许多团聚形态的颗粒,获得了更加粗糙的涂层表面组织。提高Co加入量后,会引起金属颗粒发生尺寸增大,形成相互团聚的金属颗粒,导致涂层内产生部分通路,涂层导电模式由电子隧穿方式转变至金属接触导电类型。加入的Co颗粒含量超过58.8%(原子分数)之后继续提高,涂层电阻率呈现线性变化,涂层获得了更大的饱和磁化强度,发生了金属颗粒团簇,引起矫顽力升高。当Co的含量于51.6%~62.0%之间发生改变时,涂层由超顺磁态过渡到了铁磁态,发生了铁磁和超顺磁共同存在的现象。

In order to improve the electromagnetic performance of CeO2 coating on the surface of electronic components,the Co/CeO_(2)composite coatings with different Co contents were obtained under different powers of Co metal target.The structure and electromagnetics properties were studied by experiment.Results showed that the growth rate increased linearly with increasing Co content,and the different diffraction peaks of Co with hexagonal lattice characteristics were detected.With the increase of Co content,the width of diffraction peak became wider and the intensity increased obviously.In the surface area of the coating,many agglomerated particles emerged,and the roughness of coating surface was increased.Increasing Co content would cause the size of metal particles to increase,forming agglomerated metal particles,which led to the formation of a partial path in the coating,consequently,the coating conductive mode was changed from the electron tunneling mode to the metal contact conductive type.After the content of added metal particles exceeded 58.8%,the amount of Co was further increased,and the resistivity of the coating presented a linear change.The coating obtained a greater saturation magnetization,and metal particle clusters occurred,causing an increase in coercive force.When the content of Co changed between 51.6%and 62.0%,the coating was changed from superparamagnetic state to ferromagnetic state,and the co-existed ferromagnetism and superparamagnetic state occurred.