直拉法单晶炉随动式加热器设计

Design of Follow-Up Heater for Czochralski Single Crystal Furnace

单晶炉是一种在以高纯氩气为主的惰性气体环境中,用石墨热场加热,将多晶硅材料加以熔化,用直拉法生长单晶硅的设备,在太阳能单晶硅拉制的过程中,如何提高拉晶的速度和质量以及降低设备的能耗一直是单晶硅厂家永恒的追求。本文从机械结构的角度分析了坩埚上升在单晶炉拉晶过程中所造成的拉晶速度下降和额外能耗问题,在此问题的基础上提出了一种加热器随坩埚在拉晶过程中上升的单晶炉结构优化方法,并通过有限元仿真对单晶炉优化前后晶体和熔体的热场以及拉晶过程中加热器功率进行分析。结果表明,改进后的单晶炉不仅可以提高拉晶过程的稳定性和拉晶速度,从而进一步提高单晶炉的拉晶质量和产量,而且还能有效降低单晶炉拉晶的能耗。

Single crystal furnace is a kind of equipment which uses graphite thermal field to melt polysilicon materials in the inert gas environment dominated by high-purity argon,and grows single crystal silicon by Czochralski method.In the process of solar single crystal silicon drawing,how to improve the speed and quality of drawing crystals and reduce the energy consumption of equipment has always been the eternal pursuit of single crystal silicon manufacturers.From the perspective of mechanical structure,this paper analyzes the decrease of crystal drawing speed and extra energy consumption caused by rising crucible in single crystal furnace.On the basis of this problem,a method for optimizing the structure of single crystal furnace with crucible rising in the process of crystal drawing was proposed,and through the finite element simulation,the thermal field of the crystal and the melt before and after the optimization of the single crystal furnace and the heater power during the crystal drawing process were analyzed.The simulation analysis shows that the optimizing single crystal furnace can not only improve the stability and speed of crystal drawing process,so as to further improve the quality and output of single crystal furnace,but can also effectively reduce the energy consumption of single crystal furnace.