纳米光机械系统技术研究现状和进展

Status and development progress of nano-opto-mechanical system technology

微光机电系统技术作为微机电系统(micro-electro-mechanical systems,MEMS)技术在光学领域的延伸,通过微机电结构对光参量进行调控,研制出一系列对产业影响深远的微型器件,例如数字微镜、阵列光开关、激光雷达等。最近几年,微纳加工技术的进步促进了集成硅光子技术和纳机电系统技术的发展,并结合形成了集成度更高、功耗更低、信噪比更好的新型微光学器件平台技术——“纳米光机械系统技术”。通过单片集成激光器、探测器和换能器,可以在毫米尺度的芯片上,搭建一个完整的高性能微光学系统,并成功用于单光子操纵、单分子检测等高精密检测领域。从纳米光机械技术的出现背景和基础知识出发,详细介绍基于此技术的新型全光逻辑门和新型惯性传感器等高性能器件的研究进展。

An extension of MEMS technology into the field of optics,optical MEMS technology creates a series of miniature devices with high impact on the industry,such as digital micromirror,optical switch array,lidar and so on.In recent years,the development of integrated silicon photonics technology and nano electromechanical system technology is forming a new integrated photonics sensor platform with ultra-compact,low power consumption and high signal-to-noise ratio,called“Nano-Opto-Mechanical System(NOMS)Technology”.With the single-chip integration of lasers,detectors,and transducers,a highperformance micro-optical system can be built on chips with dimensions of few millimeters.NOMS has successfully been used in various promising applications,such as single-photon manipulations and single-molecule detections.This paper introduces in detail about the all-optical logic gates and a novel inertial sensor and based on NOMS technology.