摘要
随着第五代(5G)通信技术在世界上的快速商业化,市场对5G频段的射频(RF)滤波器需求急剧增长。基于压电薄膜的声学谐振器作为实现高性能射频滤波元件的有效解决方案之一,具有高性能、低成本、器件尺寸小的优点,因此备受关注。给出了常见压电材料的材料性质,并分析了氮化铝(AlN)和铌酸锂(LiNbO_(3))薄膜在声学滤波技术中备受关注的原因;简要介绍了不同声学谐振器结构的原理、结构和关键参数,以及构成滤波器的拓扑;介绍了2种有望应用于5G频段的基于铌酸锂薄膜谐振器/滤波器的相关技术,着重突出了横向激发体声波谐振器(XBAR)的原理、设计及其在5G Sub-6GHz乃至毫米波频段滤波器中的应用。
With the rapid commercialization of 5G communication technology in the world,the market demands for radio frequency(RF)filters continue to grow.Piezoelectric films based on acoustic wave resonators and filters have been attracting great attention as one of the effective solutions for high-performance RF front-end modules while offering low cost and small device size.This article gives the material properties of common piezoelectric materials,and analyzes the reasons why aluminum nitride(AlN)and lithium niobate(LiNbO_(3))have attracted much attention in acoustic filtering technology;and then briefly introduces the structure,the principle,and key parameters of different acoustic resonators,as well as the filter topology.Finally,two related technologies based on LiNbO_(3) film resonators/filters that are expected to be applied in the 5G frequency band are introduced.It emphasizes the principle and design of transversely excited bulk acoustic wave resonator(XBAR)and its application in 5G Sub-6GHz and even millimeter wave band filters.
作者
刘玉帅
刘康福
吴涛
LIU Yushuai;LIU Kangfu;WU Tao(School of Information Science and Technology,ShanghaiTech University,Shanghai 201210,China)
出处
《微纳电子与智能制造》
2020年第4期136-151,共16页
Micro/nano Electronics and Intelligent Manufacturing
基金
国家自然科学基金(61874073)项目资助。
