电子背散射衍射的制样方法和影响花样质量的因素

Sample preparation methods for electron backscatter diffraction and affecting factors on the pattern quality

概述了电子背散射衍射(EBSD)原理。EBSD试样的制备质量很大程度上决定着EBSD测试的可行性和花样的质量。介绍了各种抛光方法的优缺点,包括机械抛光、化学抛光、电解抛光和离子束处理等。总结了影响EBSD花样质量的因素,主要包括样品的状态、电镜参数的设置和数据获取软件参数的设置等。研究对于EBSD技术的初学者具有很好的指导作用。

The principle of electron backscatter diffraction( EBSD) was reviewed. The practicability of testing and the pattern quality of EBSD was greatly decided by the quality of sample preparation. The advantages and disadvantages of various polishing methods,including mechanical polishing,chemical polishing,electrolytic polishing and ion beam treatment,were introduced. The factors affecting the quality of EBSD pattern were summarized,including the state of sample,the setting of electron microscope parameters and the setting of data acquisition software. This study provided a good guidance for beginners of EBSD technology.