摘要
微电子机械系统(MEMS)皮拉尼真空计可广泛用于芯片封装和设备测试等领域。量程是MEMS皮拉尼真空计的重要性能指标之一。设计了一种复合式MEMS皮拉尼真空计,通过将具有不同测量范围的两款器件串联复合在同一芯片上,实现量程的扩展。以二极管型皮拉尼真空计为例设计了器件结构,优化了尺寸参数,并给出了兼容CMOS工艺的制造方案。最后通过COMSOL仿真,获得器件气压测量范围可达2.5×10^(-3)~1.15×10^(6)Pa,同时平均灵敏度达到132 mV/dec。相比于现有的单一型和组合式器件,设计的复合式MEMS皮拉尼真空计可以在小尺寸情况下具有更大的量程兼更高的灵敏度。
Micro-electromechanical system(MEMS)Pirani vacuum gauges can be widely used in chip packaging,equipment testing and other fields.Measurement range is one of the important performance indicators of MEMS Pirani vacuum gauges.A composite-type MEMS Pirani vacuum gauge was designed,and its measurement range was expanded by combining two devices with different measuring ranges in series on the same chip.With a diode-type Pirani vacuum gauge as an example,the device structure was designed,the size parameters was optimized,and a manufacturing scheme compatible with CMOS process was given.Finally,through COMSOL simulation,the designed device has a pressure measurement range of 2.5×10^(-3)~1.15×10^(6)Pa and a average sensitivity of 132 mV/dec.Compared with the existing single and combined-type devices,the designed composite-type MEMS Pirani vacuum gauge has larger range and higher sensitivity in a small size.
作者
周琼
傅剑宇
刘超
侯影
陈大鹏
Zhou Qiong;Fu Jianyu;Liu Chao;Hou Ying;Chen Dapeng(Integrated Circuit Aduanced Process R&.D Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Wuxi IOT Innovation Center Co.,Ltd.,Wuzi 214135,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第1期47-53,共7页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61874137)
北京市科委重点研发计划资助项目(Z191100010618005)
中国科学院科研仪器设备研制项目(ZDKYYQ20200007)。
