双压电振子反相模态驱动的直线驱动器机理

Mechanism of a linear actuator driven by dual piezoelectric oscillators in inverse mode

为提高压电驱动器的定位能力,提出了一种双压电振子反相模态驱动的直线驱动器,以两组反相模态振动的独立控制的压电振子作为主压电振子和辅压电振子,分别产生机构运动的拉力和推力使驱动器在倾斜平面上直线运动。理论分析了双压电振子反相模态驱动的驱动器双向运动条件,设计研制了驱动器样机并进行了性能测试。结果表明:该驱动器能在10°倾斜角内实现定向稳定运动,机构的最小步距为5μm,最大平均速度为22 mm/s。

A linear actuator driven by dual piezoelectric oscillators in inverse mode is proposed in order to improve the positioning ability. Two groups of independent controlled piezoelectric oscillators in inverse mode are used as the main and auxiliary piezoelectric oscillators. The oscillators generate the pulling force and thrust force,under which the actuator moves stably in the inclined plane. The bi-directional motion condition of the actuator is obtained. The prototype of the actuator was designed and developed,and the performance test was carried out. The linear actuator driven by dual piezoelectric oscillators in inverse mode outputs large speed and power,and realizes directional and stable motion in a inclined plane with an angle of 10°. The minimum step distance of the actuator is 5 μm,the maximum average speed is 22 mm/s.