应用于真空镀膜设备的视窗失效分析及改进方案

Viewing Window Failure Analysis and Improvement Scheme for Vacuum Coating Equipment

对视窗被广泛应用于真空镀膜设备视窗失效的情况分析,找到视窗失效的主要原因是,视窗吸附并沉积的镀膜材料越来越多,导致透光率越来越低,造成光电传感器无法正常工作,提出了一种改进方案并应用于实践,取得了显著的改善效果。

Through the analysis of the failure of windows which are widely used in vacuum coating equipment,it is found that the main reason for the failure of windows is that more and more coating materials are adsorbed and deposited on the windows,which leads to lower and lower light transmittance and makes the photoelectric sensor unable to work normally.An improvement scheme is proposed and applied in practice,and remarkable improvement effect is achieved.