基于叉指电容阵列模块的宽量程微纳力源装置

Wide Range Micro-Nano Force Source Device Based on Interdigital Capacitor Array Module

微纳牛顿量级的标准力源是微纳力测量和量值溯源装置中的核心部件,如何在较低电压下获得稳定的宽量程标准微纳力源,是提高微纳力测量装置测量准确度、扩大测量范围需解决的重要技术问题。利用叉指电容结构,通过引入叉指电容阵列的方法,设计了一种能在较低电压下输出宽量程标准微纳力值的力源。经分析表明:该装置能在较低恒定电压下实现稳定的宽量程微纳力值输出,且通过微纳力源阵列模块化的布置及控制,能在不增加装置复杂程度条件下,增大装置输出范围与分辨率;利用微纳力源阵列模块的对称布置以及叉指电容结构,极大减小了模块偏载和弹性支撑结构形变对输出微纳力值的影响,保证微纳力源的准确度,为微纳力测量和量值溯源装置中低电压、宽量程微纳力源的设计与制造提供了有益依据。

The micro/nano force source is the core component of the force measurement and quantity traceability device.How to obtain a stable wide-range standard micro-nano force source at a low voltage is an important technical problem to be solved to improve the measurement accuracy and expand the measurement range of the micro-nano force measurement device.By using the interdigital capacitor structure and introducing the capacitor array,a force source that can output a wide range of standard micro-nano force values at a lower voltage is designed.The analysis shows that the device can achieve a stable output of a wide range of micro-nano force values at a low constant voltage,and the modular arrangement and control of the micro-nano force source array can increase the output range and resolution of the device without increasing the complexity of the device.The symmetrical arrangement of the micro-nano force source modules and the interdigital capacitor structure greatly reduce the influence of the module bias and the deformation of the elastic support structure on the output micro-nano force value and ensure the accuracy of the micro-nano force source.