退火温度对FeCoTiO纳米颗粒膜软磁性能的影响

Influence of annealing temperature on the soft magnetic properties of FeCoTiO nanogranular films

采用射频磁控溅射法制备FeCoTiO纳米颗粒膜,在不同温度下进行退火处理,研究退火温度对其磁性能的影响。结果表明,随着退火温度的升高,在低于200℃时薄膜受应力变化机制影响较大,体现为矫顽力H_(c)、各向异性场H_(k)、截止频率fr降低,磁导率实部μ’增大;在高于200℃时以晶粒长大机制为主,体现为H_(c)、H_(k)、f_(r)增高,μ’减小。综合考虑FeCoTiO纳米颗粒膜磁性能在各退火温度下的表现,在制备集成磁膜微电感的过程中,确定250℃是聚酰亚胺的最佳高温胶联化温度。

The FeCoTiO nanogranular soft magnetic films for magnetic core application were prepared by RF magnetron sputtering method,followed by annealing at various temperatures.The influences of annealing temperature on their soft magnetic properties were studied.The results show that the thin films were mainly influenced by stress variation for temperature below 200℃.The coercivity H_(c),anisotropy field H_(k) and the cut-off frequency f_(r) decrease,and the real part of permeabilityμ’increases with the increase of annealing temperature.For temperature above 200℃,the thin films were mainly influenced by grain growth.The H_(c),H_(k) and f_(r) increase,and theμ’decreases with the increase of annealing temperature.Considering the performance of the FeCoTiO nanogranular soft magnetic films’magnetic properties at various annealing temperatures,the temperature of 250℃is the polyimide gelation procedure’s optimal technical parameter in the process of preparing the magnetic integrated micro-inductors.