摘要
为解决传统机电引信在弱环境力条件下无法实现保险解除及传统固态开关无法实现低压驱动(5~35 V)的问题,提出了基于硅基MEMS加工工艺与电晕放电效应的微型引信固态保险设计.结构采用微米尺度设计思想,实现固态保险与引信控制系统能量与信息联通.通过建立电晕放电数学模型,借助COMSOL等有限元分析方法,完成基于低电压驱动的固态保险控制层设计,并结合实验室静态测试实现控制层平均驱动电压(33.1 V)设计.结合电容放电模式与电学与焦耳热仿真,其中,电容储能指标(10 V,10μF).完成执行层在不同电流强度环境下结构设计.借助MEMS加工工艺,最终实现弱环境力微型引信固态保险设计与制备.
In order to solve the problem that the traditional electromechanical fuze cannot complete the insurance release under the weak environmental forces and the traditional MEMS solid state switch cannot achieve the low-voltage driving capacity(5~35 V).A MEMS solid-state fuze was proposed based on silicon-based MEMS processing technology and corona discharge effect.A micrometer-scale design idea was used to achieve energy and information communication between the solid-state fuze and the fuze control system.First,establishing a mathematical model of Corona discharge and using finite element analysis methods such as COMSOL,the solid-state insurance control layer based on low-voltage driving was completed,and the average driving voltage(33.1 V)of the control layer was achieved in laboratory static testing.Second,the capacitor discharge mode was combined with electrical and Joule thermal simulations,using the capacitor energy storage index(10 V,10μF).Finally,the structural design of the execution layer under different current intensity environments was completed.Based on the MEMS processing technology,the production of solid-state safety fuze was finally achieved.
作者
冯恒振
娄文忠
孙毅
赵悦岑
FENG Hengzhen;LOU Wenzhong;SUN Yi;ZHAO Yuecen(School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China;Chongqing Innovation Center, Beijing Institute of Technology,Chongqing 401120, China)
出处
《北京理工大学学报》
EI
CAS
CSCD
北大核心
2021年第3期231-236,共6页
Transactions of Beijing Institute of Technology
关键词
微型引信
弱环境力解保
电晕放电
固态保险
低压驱动
MEMS fuze
weak environmental force release
Corona discharge
solid state fuze
low voltage drive