基于微透镜阵列的交互式多公差同步分析方法

Simultaneously Analysis on Assembly Errors forMicrolens Array Using an Interactive Method

微透镜阵列经常被用于改善激光辐照度分布均匀性,相对于单种公差对辐照度分布均匀性影响的研究,多种装配公差对辐照度分布均匀性影响的研究很少。通过构建自动化的误差分析平台,可以将多种装配公差同时输入,并将分析结果以可视化的方式进行同步呈现。利用这一平台分析了透镜阵列在三个空间轴上的距离误差、偏移误差、旋转误差以及多种公差的叠加,并获得输出光束照度分布随之变化的规律。使用该平台对几个案例进行分析,结果表明该平台简单直观且同时实现对多种公差进行分析,对微透镜阵列的装调具有很好的指导作用。

Microlens array has been used to improve the irradiance uniformity of laser beam.Many studies have been carried out on how each assembly position error affects the irradiance uniformity,however,there is little analysis of how the combinations of these errors affect the uniformity at the same time.In this paper,an automatic analysis platform for tolerances or errors is set up,which allows simultaneously importing parameters of these errors and visually presenting the analysis results of the irradiance uniformity eventually.As an example,we studied distance errors,offset errors and rotation errors in a microlens array on 3 spatial axes using this platform and obtained the relationship between the illuminance distribution and these errors alone or combined.In addition,a few other cases were analyzed with this platform.The results showed that direct and simple of the platform and its realization of the automatic analysis of these errors would be of great benefit to assembling of microlens array.