压电式动态力传感器校准方法的研究

Calibration method of piezoelectric dynamic force sensor

针对智能制造行业里压电式传感器的动态性能校准问题,介绍了针对传感器动态力参数的相关方法和脉冲力法校准装置,在装置上完成了试验验证和分析。介绍了两种常规的动态力校准方法,针对不同的校准方法建立了运动方程,做出了差异性分析。然后介绍了一种基于绝对法测量的压电式传感器脉冲力法校准装置,装置的结构包括基于刚体碰撞的脉冲力发生装置和基于外差式迈克尔逊干涉仪的测量系统,说明了工作原理和解算方法。最后利用建立的校准装置对典型压电式传感器进行动态力校准,进行结果分析和可靠性验证。

Aiming at the problem of dynamic performance calibration of piezoelectric sensors in intelligent manufacturing industry,related methods of dynamic force parameters of sensors and calibration device of impulse force method were introduced,the test verification and analysis were conducted on the device.Here,two conventional dynamic force calibration methods were introduced,motion equations for different calibration methods were established,and the difference analysis was made.Then,a calibration device for piezoelectric sensor impulse force method based on the absolute method measuring was introduced.The structure of the device included an impulse force generator based on rigid body collision and a measurement system based on heterodyne Michelson interferometer.Their working principle and calculation method were explained.Finally,dynamic force calibrations for typical piezoelectric sensors were conducted by using the established calibration device,and the result analysis and reliability verification were performed.