一种(10^(5)~10^(-8))Pa真空计校准装置的设计

The Design of a(10^(5)~10^(-8)) Pa Vacuum Gauge Calibration Apparatus

针对(10^(5)~10^(-8))Pa复合型真空计的一次性校准需求,设计出相应的校准装置。装置主要由校准室、真空测量模块、抽气与供气模块、标准气体流量计、烘烤模块等部分组成。设计的校准室为球形容器,通过串联分子泵组和离子泵抽气,在校准室中获得10^(-9) Pa量级的极限真空度。真空计的校准通过静态比较法、动态比较法及标准流量法实现,静态比较法采用电容薄膜真空计作为参考标准实现(10^(5)~10^(-1))Pa的校准范围;动态比较法用磁悬浮转子真空计作为参考标准实现(10^(-1)~10^(-4))Pa的校准范围;标准气体流量法采用(10^(-5)~10-9)Pa·m^(3)/s的标准气体流量计提供标准气体流量,实现(10^(-4)~10^(-8))Pa的校准范围。本文设计的校准装置范围为(10^(5)~10^(-8))Pa,合成标准不确定度估计为0.9%~2.3%,解决了对宽量程真空计的一次性校准技术问题。

Aiming at the one-time calibration requirement of compound vacuum gauge with the range of(10^(5)~10^(-8)) Pa,a corresponding calibration apparatus is designed.The apparatus is mainly composed of a calibration chamber,a vacuum measurement module,a pumping and gas supply module,a standard flowmeter,and a baking module.The designed calibration chamber is a spherical vessel,which is pumped by a series of molecular pumps and ion pump to obtain the ultimate vacuum degree of 10-9 Pa in the calibration chamber.The calibration is realized by the static comparison method,the dynamic comparison method,and the standard flow method.The static comparison method uses a capacitance diagram gauges(CDG) as the reference standard to achieve the calibration range of(10^(5)~10^(-1)) Pa.The dynamic comparison method uses a spinning rotor gauge(SRG) as the reference standard to achieve the calibration range of(10^(-1)~10^(-4)) Pa.The standard gas flow method adopts a(10^(-5)~10^(-9)) Pa·m^(3)/s standard gas flowmeter to provide the standard gas flow rate and achieve the calibration range of(10^(-4)~10^(-8)) Pa.The calibration range of the designed apparatus is(10^(5)~10^(-8)) Pa with a combined standard uncertainty of 0.9%~2.3%,which solves the technical problem of one-time calibration for wide-range vacuum gauges.