基于Si弹性层优化的悬臂梁式微压电驱动器

Cantilever Beam Micro Piezoelectric Actuator Based on Optimization of Silicon Elastic Layer

基于压电材料的逆压电效应,设计并制备了悬臂梁式微压电驱动器,通过电能到机械能的转换,完成装置的位移输出任务。基于悬臂梁式微压电驱动器的设计和仿真,得出该微驱动器Si弹性层的最佳厚度为0.12 mm,仿真结果显示压电层与弹性层厚度比为2~3时,尖端位移输出较大,并模拟了其电压-位移输出情况。采用共晶键合的工艺制备了以PZT-5H为压电层、Au为电极层和Si为弹性层基板并带有Si质量块的微压电驱动器,搭建了直观的激光反射装置作为实验测量系统,测量出在100 V电压条件下,该驱动器的最大输出位移为60μm,最大偏转角为1.948°,在0~100 V初始阶段仿真结果与实验结果具有较高的吻合度,平均相对误差为0.3095。

Based on the inverse piezoelectric effect of piezoelectric materials,a cantilever beam micro piezoelectric actuator was designed and prepared.The displacement output task of the device was finished through the conversion of electrical energy to mechanical energy.Based on the design and simulation of the cantilever beam micro piezoelectric actuator,the optimal thickness of the Si elastic layer of the micro actuator is 0.12 mm.Simulation results show that the tip displacement output is larger when the thickness ratio of the piezoelectric layer and elastic layer is2-3.Besides,the output of voltage-displacement was simulated.With PZT-5 H as the piezoelectric layer,Au as the electrode layer and Si as the elastic layer substrate,the micro piezoelectric actuator with Si mass block was prepared by the eutectic bonding process.An intuitive laser reflection device was built as the experimental measurement system.The measured results show that at the voltage of 100 V,the maximum output displacement of the actuator is 60μm,the maximum deflection angle is 1.948°.The simulation results and experiment results have a high degree of agreement at the 0-100 V initial stage,and the average relative error is 0.3095.