微结构阵列超精密车床快刀伺服装置及试验研究

Fast tool servo system of ultra-precision turning machine for microstructure arrays and its experimental study

各种微结构阵列在LED照明、液晶显示、光学仪器等领域得到了广泛的应用,但其结构细微复杂且形状表面质量要求高,其加工工艺技术研究引起了广泛的关注。本文提出压电陶瓷驱动结合柔性铰链作为刀架的快刀伺服装置,建立快刀伺服系统的机电耦合模型,研究各系统参数对系统性能的影响规律,基于有限元仿真对铰链结构参数进行优化;通过激光位移传感器测试刀具输出位移的线性度;利用研制的快刀系统和超精密车床在红铜材质的圆柱面上进行正弦网格微结构加工,加工结果表明所设计的快刀系统能够准确有效地加工出结构复杂的微结构阵列。

The microstucture arrays are widely used in the fields of LED lighting,liquid crystal display and optical instruments.Due to the tiny and complex structure and the high requirements of figure and surface quality,the study on the process technology of microstructures causes wide attention.A FTS(fast tool servo)device with the combination of piezoelectric ceramics actuator and flexible hinge holder was presented.The electro-mechanical coupled model of the FTS system was established and the effect of the system parameters on the system behaviors was investigated.The optimization of the structure parameters of flexible hinge holder was performed on the basis of the finite element simulation.The linearity of the output displacement of the tool was measured by laser displacement sensor.Finally,the microstructure of sinusoidal grids on the cylindrical surface of red copper was processed with the FTS and ultra-precision turning machine,and the machining results indicate that the designed FTS is able to accurately and effectively process the microstucture arrays with complex structure.