中压微波等离子体炬激发过程特征分析

Analysis of the characteristics of the excitation process of the medium pressure microwave plasma torch

本文建立了中压情况下耦合麦克斯韦方程的自洽二维流体等离子体模型,添加了有关分子离子的一系列动力学反应方程,展示了在中压条件下的激发过程中电子密度、温度、电场模值、趋肤深度等参数的变化.分析了分子离子空间分布的主要原因.另外与常压微波等离子体对比发现中压微波等离子体气体温度较低,对石英管的损害较小,能够适用于各种废气的处理、纳米颗粒的合成以及薄膜的制备,易于实现大规模化,具有很好的应用前景.

A self-consistent two-dimensional fluid plasma model coupled with Maxwell's equation at medium pressure is established,and a series of kinetic reaction equations of molecular ions are also added.We demonstrate the changes of electron density,temperature,electric field module,skin depth and other parameters in the excitation process at medium pressure.The dominated reason for the spatial distribution of molecular ions is analyzed.In addition,compared with the atmospheric pressure microwave plasma,it is found that the gas temperature of the medium pressure microwave plasma is lower and the damage to the glass tube is smaller.It can be applied to the treatment of various exhaust gases,the synthesis of nanoparticles and the preparation of thin films,which is easy to achieve large-scale,and has a good application prospect.