基于有限元的超精密空气静压主轴最佳综合刚度设计

The Optimum Comprehensive Stiffness Design of Ultra Precision Aerostatic Spindle Based on Finite Element Methodd

超精密空气主轴的刚度是超精密主轴的一个非常重要的指标,轴承的结构形式、气膜结构参数均对刚度指标有影响。本文通过工程计算得到气膜刚度等参数后,在特定空间尺寸和重量的限制条件下,基于有限元进行Nanosys-600F五轴超精密机床的气浮主轴(C轴)机械结构设计,通过多次分析,得到了气浮主轴(C轴)最佳综合刚度结构参数。

The stiffness index of ultra precision air spindle is a very important index of ultra precision spindle. The structural style and air film structure parameters all have an impact on the stiffness index. After obtaining the air film stiffness and other parameters through engineering calculations, the mechanical structure design of the air-floating spindle(C-axis) of the Nanosys-600 F five-axis ultra-precision machine tool is carried out based on the finite element under the constraints of the specific space size and weight. Through analysis, the best comprehensive stiffness structure parameters of the air bearing main shaft(C axis) are obtained.