摘要
针对航空科学技术产业中超精密加工对微纳米尺度的测试要求,本文提出一种白光干涉三维形貌快速测量算法。该算法通过将移相扫描精相位与垂直扫描粗相位融合,得到待测样品的三维形貌测量结果,并采用二维离散差分算法判断并消除待测样品在阶跃形貌的边缘处产生的蝙蝠翼误差,得到高精度的三维形貌测量结果,试验证明该算法纵向分辨率可达亚纳米精度。
This paper propose a white light three-dimensional topography rapid measurement algorithm,aiming at the demand of ultra-precision machining in the aviation science and technology industry on the micro-nano scale.The three-dimensional profile is accomplished by fusing the fine phase obtained from the phase-shift scanning with the coarse phase from the vertical scanning.The bat wing error at the edge of the step is distinguished and then eliminated by utilizing the two-dimensional discrete difference method.The experiment results demonstrate that the sub-nanometer measurement precision can be achieved by the proposed algorithm.
作者
雷李华
李强
傅云霞
Lei Lihua;Li Qiang;Fu Yunxia(Shanghai Insistute of Measurement and Testing Technology,Shanghai 201203,China;Shanghai Key Laboratory of Online Test and Control Technology,Shanghai 201203,China;National Key Laboratory of Science and Technology on Metrology&Calibration,AVIC Changcheng Insistute of Metrology and Measurement,Beijing 100095,China)
出处
《航空科学技术》
2021年第3期62-70,共9页
Aeronautical Science & Technology
基金
航空科学基金(201856Y5001)
国家重点研发计划项目(SQ2019YFB20002503)
国家市场监管总局科技项目(2019MK016)。
关键词
白光干涉
三维形貌
相位融合
垂直扫描
white light interference
profile measurement
phase fusion
vertical scanning
