可变电容式直线静电电机的驱动器设计

Driver Design of Variable Capacitance Linear Electrostatic Motor

可变电容式直线静电电机在基于正弦波的驱动法下低速性能差,放大变换器体积庞大且设计复杂。针对这一问题,文中提出了一种基于方波的驱动方法。该方法将定子电极分为A相电极、B相电极和C相电极,每相电极接入时序不同的幅值为1 kV的方波驱动信号;动子电极则依次分别接入正极性电压和负极性电压。定子和动子间的电位差引起的静电力作为电机的驱动力。为了获得紧凑有效的电源和幅值为1 kV的三相方波,设计了基于推挽拓扑的DC-DC直流可调电源和基于半桥的驱动电路。仿真实验结果表明,该设计使得电机两端驱动波形在低速时顺滑,电机可以平稳地前进、正转和反转。

In view of the problems of poor low-speed performance of the variable-capacitance linear electrostatic motor under the sine wave-based driving method and the complicated design of the large-scale converter,a driving method based on the square wave is proposed.The stator electrodes are divided into A-phase electrodes,B-phase electrodes,and C-phase electrodes.Each phase electrode is connected to a square wave drive signal with a magnitude of 1 kV at different timings.The electrostatic force caused by the potential difference between the stator and the mover is used as the driving force of the motor.In order to obtain a compact and efficient power supply and a three-phase square wave with an amplitude of 1 kV,a DC-DC adjustable DC power supply based on a push-pull topology and a drive circuit based on a half bridge are designed.The feasibility of this method is proved by simulation and experiments.At low speeds,the drive waveforms at both ends of the motor are smooth,and the motor can move forward,forward and reverse smoothly.Simulation experiments show that at low speeds,the drive waveforms at both ends of the motor are smooth,and the motor can move forward,forward and reverse smoothly,indicating the feasibility of the proposed method.