国产Lift-Off光刻胶在空间用太阳电池中的应用

选用两种较为典型的国产Lift-Off光刻胶(A和B)进行了实验优化,并进行了电极蒸镀后的牢固度测试、电致发光测试和电性能测试。在牢固度测试中发现,A电池样品有掉栅现象,B电池样品没有出现掉栅现象。通过EL测试和电性能测试分析证明,A电池的电极与太阳电池基体存在局部的接触不良现象。通过实验筛选出了一种应用前景较好的B型号国产Lift-Off负性光刻胶,有望经过进一步验证和优化后逐步应用在空间用太阳电池生产中。

Two kinds of domestic Lift-Off photoresist(type A and type B)were taken to carry out the experments.Firstly,process of the two kinds of photoresist was optimized and metal grid line was made.Secondly,the firmness of the gridline was tested by top contact integrity test.The specimen of type B succeed in the firmness test and type A failed.Both EL test and IV test show insufficient contact of the metal grid and solar cell surface.Through our experiment,photoresist of Type B was selected out,which is expected to be applied in the production of space solar cells after further process optimization.