K型单刀四掷射频MEMS开关设计

Design of K-type single-pole four-throw RF MEMS switch

针对射频器件小型化的发展需求,设计了一种新型射频微机电系统(MEMS)单刀四掷开关结构,通过K型功分器与四个单刀单掷开关级联而成,实现低插损、高隔离的射频性能。其中,K型功分器设计是由1个输入端、4个输出端及1个圆盘型结构优化组成。仿真结果表明:在DC-20 GHz频段内,该单刀四掷开关的插入损耗≤0.41 dB,隔离度≥21 dB,驱动电压为12.4 V;并且在整个工作频段内射频性能稳定,波动幅度小,线性度高。设计的K型单刀四掷开关整体尺寸为2.11 mm×1.6 mm×0.6 mm,在L~Ku(1~18 GHz)波段的小型化无线通信系统中具有较大的应用潜力。

Aiming at the development requirement miniaturization of radio frequency(RF)devices,a novel RF micro-electro-mechanical-system(MEMS)single-pole four-throw(SP4T)switch with low insertion loss and high isolation is proposed,which is cascaded with a K-type splitter and four single-pole single-throw switch,.Among them,the K-type power divider design is composed of one input terminal,four output terminals and a disc-shaped structure.The results show that the insertion loss of the single-pole four-throw switch is≤0.41 dB,the isolation is≥21 dB,the driving voltage is 12.4 V and the RF performance is stable throughout DC-20GHz frequency band,the fluctuation amplitude is small,and the linearity is high.The overall size of the K-type single-pole four-throw switch designed in this paper is 2.11 mm×1.6 mm×0.6 mm,which has more potential applications in the miniaturized wireless communication system of L~Ku(1~18 GHz)band.