基于激光干涉仪数字信号解码的振动校准方法

Vibration Calibration Method Based on the Decoding of Heterodyne Interferometer Output S/PDIF Digital Signal

提出了一种基于Polytec外差激光干涉仪输出S/PDIF数字信号解码的加速度计校准方法,优化了校准过程,并保障了加速度计的灵敏度幅值与相位校准精度。通过与ISO 16063-11推荐的外差激光干涉法在5 Hz~20 kHz频率范围内的校准结果对比,提出方法的灵敏度幅值相对误差与相位差分别小于0.969%和0.165°;灵敏度幅值相对标准差与相位标准差分别小于0.560%和0.356°。

An accelerometer calibration method based on Polytec heterodyne interferometer output S/PDIF digital signal decoding is proposed,which optimizes the calibration process and guarantees the sensitivity magnitude and phase calibration accuracy of the accelerometer. Comparing with the calibration results of the heterodyne interferometry recommended by ISO16063-11 in the frequency range from 5 Hz ~ 20 kHz,the relative error of sensitivity magnitude and difference of sensitivity phase by the proposed method are less than 0. 969% and 0. 165° respectively;the relative standard deviation of sensitivity magnitude and the standard deviation of sensitivity phase are less than 0. 560% and 0. 356° respectively.