基于倾斜相位的抗振动干涉面形测量

Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase

环境振动会在干涉测量过程中产生随机倾斜、移相误差,导致测量精度下降。为了降低环境振动对移相干涉测量的影响,提出了一种基于倾斜相位的抗振动干涉面形测量方法。首先,利用Fourier变换将干涉图变换到频域;然后,利用频域细分操作对峰值坐标进行亚像素精度定位,求解出振动倾斜平面;最后,利用最小二乘法计算出待测面的相位分布。实验结果表明,本方法与同步移相法的复原结果具有高度一致性,波面峰谷值和均方根值的偏差较小;且本方法无需对硬件进行改动,可为振动环境下的移相干涉测量提供一种低成本、高精度的解决方案。

Environmental vibrations introduce random tilt and phase-shifting errors in interferometric measurement,which reduce the accuracy of the final measurements.To reduce the influence of these vibrations,this article proposes anti-vibration interferometric shape measurement based on tilt phase.First,the interferograms are Fourier-transformed into the frequency domain.Next,the peak coordinates are located at subpixel precision by a frequency-domain subdivision operation and the vibration tilt plane is extracted.Finally,the phase distribution is extracted by a least-squares algorithm.Experimental results show that the phase distributions retrieved by the method are highly consistent with those obtained by the simultaneous phase-shifting interferometry,with very small deviations of the peak-to-valley and root mean square values.Moreover,the method does not need to modify the hardware,and can provide a low-cost,high-precision solution for phase-shifting interferometry under vibration environment.