脉冲激光沉积微粒控制技术的研究进展

Particulate Control Technology Based on Pulsed Laser Deposition

脉冲激光沉积技术作为一种简单、通用和高效的薄膜生长技术,在科研和工业领域具有广泛的应用前景。在许多高科技应用中对薄膜质量的要求日趋严格,如何减少或消除薄膜内部和表面的微粒成为了亟待解决的问题。介绍了脉冲激光沉积技术中微粒出现的根源并讨论了各种微粒控制技术的优缺点,最后简要展望了脉冲激光沉积微粒控制技术的发展趋势。

Pulsed laser deposition has broad applications in scientific research and industry as a simple,versatile,and efficient film growth technology. The requirements for film quality are becoming more and more stringent in many high-tech applications. Reducing or eliminating the particulates inside and on the surface of a film has become an urgent problem. This paper introduces the source of particulates in pulsed laser deposition and discusses the advantages and disadvantages associated with various particulate control techniques. Finally,the trend of particulate control based on pulsed laser deposition is discussed.