用于飞秒激光绝对距离测量的法布里-珀罗标准具的设计与实现

Design and Realization of Fabry-Perot Etalon for Absolute Distance Measurement of Femtosecond Pulse Laser

法布里-珀罗标准具是许多经典和现代光学领域中非常重要的器件之一。设计了一种简单稳定的空气隙法布里-珀罗标准具,作为飞秒脉冲激光器绝对距离测量光谱分辨干涉法的核心器件。将法布里-珀罗标准具放置在迈克耳孙干涉仪两路光束会聚出光处,滤出飞秒激光光学频率梳的梳齿,通过光谱仪精确地监测出飞秒脉冲激光器绝对距离测量干涉信号的光谱功率密度,从而计算出绝对距离。详细介绍了法布里-珀罗标准具的参数设计,进行了法布里-珀罗标准具调节系统实验。简要分析了飞秒脉冲激光器绝对距离测量光谱分辨干涉法的测量原理,实验结果表明,在±1 mm测量范围内精确度可以达到±5μm以内。

Fabry-Perot etalon is an important device in many classical and modern optical fields. A simple and stable air gap Fabry-Perot etalon is designed to act as core device of spectrally resolved interferometry for absolute distance measurement of femtosecond pulse laser. The Fabry Perot etalon is placed in the place where two beams of Michelson interferometer converge so as to filter out the femtosecond optical frequency comb. The spectral power density of interference signal measured by femtosecond laser absolute distance is accurately monitored,thus the absolute distance is calculated. The parameter design of the Fabry Perot etalon is introduced in detail. The experiment of regulation system of the Fabry Perot etalon is carried out. The principle of spectrally resolved interferometry for absolute distance measurement of femtosecond pulse laser is analyzed briefly. Experimental results show that the measuring distance within ± 1 mm has the accuracy less than ± 5 μm.