摘要
提出一种新型推挽式热膨胀流陀螺结构,并解释了它的敏感机理。通过建立陀螺敏感元件的二维模型,利用COMSOL有限元分析软件对敏感元件内的温度场和气流速度场进行了计算,同时研究了角速度对温度场和气流速度场变化的影响,最后在Proteus电路仿真软件中通过建立陀螺检测电路模型定量地计算了热膨胀流陀螺的输入输出特性关系。计算结果表明,该结构设计的陀螺具有陀螺效应,角速度范围在±20 rad/s内时,热膨胀流陀螺输入角速度与输出电压关系的比例系数k为0.3293 mV/(rad·s^(-1))。该研究成果为新型结构热膨胀流陀螺的结构设计奠定了坚实的理论基础。
A new structure of push-pull thermal expansion flow gyroscope was proposed,and the sensitive mechanism was explained.The 2-D model of the gyro sensitive element was established,the temperature field and airflow velocity field in the element was calculated by finite element analysis software COMSOL.Meanwhile,the influence of angular velocity on the temperature field and airflow velocity field was also studied.Finally,the gyro detection circuit model was established and the input-output relationship of the thermal expansion flow gyro was quantitatively calculated by circuit simulation software Proteus.The calculation results show that the gyroscope with the new structure has gyro effect.When the angular velocity in the range of±20 rad/s,the coefficient k of the relationship between the input angular velocity and the output voltage of the thermal expansion flow gyroscope is 0.3293 mV/(rad·s^(-1)).This work provides a solid theoretical foundation for the structural design of the new structural thermal expansion flow gyroscope.
作者
王育新
朴林华
李备
丁霞
WANG Yuxin;PIAO Linhua;LI Bei;DING Xia(Beijing Key Laboratory for Sensor,Beijing Information Science&Technology University,Beijing 100101,China;School of Physics&Mathematics,Qingdao University of Science&Technology,Qingdao 266061,Shandong Province,China)
出处
《电子元件与材料》
CAS
CSCD
北大核心
2021年第4期333-338,共6页
Electronic Components And Materials
基金
国家自然科学基金(61771060)
北京市新世纪百千万人才工程培养资助项目(2019A20)
北京市重点实验室开放课题资助项目(2020202109)
北京信息科技大学促进高校内涵发展项目(20202021A)
现代测控技术教育部重点实验室资助(2020202101)
北京信息科技大学北京市传感器重点实验室资助(2020202108)。
关键词
热膨胀流陀螺
有限元分析
电路仿真
敏感机理
MEMS
thermal expansion flow gyroscope
finite element analysis
circuit simulation
sensitive mechanism
MEMS