基于微机械开关结构的电化学传感器测试分析研究

Analysis on Test and Analysis of Electrochemical Sensor Based on Micro Mechanical Switch Structure

基于微机械开关结构的电化学传感器是当前微机械加工技术结合传统电化学传感器技术创立的新一代传感器技术,本文研究该交叉学科需求下的常见微机械开关传感器的性能测试。通过对常见的微机械开关加工技术进行分析,进而分析了Clark氧传感器、微电极阵列传感器、Back-Cell电化学传感器、微电化学流动池传感器的综合测试结果,发现:随着元件尺寸的缩小,其反应速度更快、样品量更少、灵敏度更高且人体植入监测也更容易操作。本文认为,在新的研究领域,以及更多交叉学科的支持下,实现对硅基板微加工技术的更深度挖掘。

Electrochemical sensor based on micro mechanical switch structure is a new generation of sensor technology which is established by combining the current micro machining technology with the traditional electrochemical sensor technology.This paper studies the performance test of common micro mechanical switch sensors under the demand of this interdisciplinary.Through the analysis of common micromechanical switch processing technology,the comprehensive test results of Clark oxygen sensor,microelectrode array sensor,back cell electrochemical sensor and micro electrochemical flow cell sensor are analyzed.It is found that with the reduction of component size,the reaction speed is faster,the sample quantity is less,the sensitivity is higher and the human implantation monitoring is easier to operate.In this paper,we think that with the support of new research fields and more interdisciplinary subjects,we can realize deeper mining of silicon substrate micro machining technology.