晶圆传输机器人末端执行器的拓扑优化

Topology Optimization of End-effector of Wafer Transfer Robot

为了实现晶圆片快速稳定传输,通过拓扑优化设计了新的机器人末端执行器结构。首先,利用三维UG软件对晶圆传输机器人末端执行器进行实体建模;采用ANSYS对末端执行器进行静力学仿真,并对仿真结果进行分析,对其进行拓扑优化,计算出新的末端执行器结构,建立新的模型;最后,用ANSYS对新的末端执行器分别进行静力学仿真和动力学模态仿真,验证了此机械结构具有合理性。结果表明,新结构的末端执行器更省材料,形变、应力变化不大,固有频率符合要求,更有利于晶圆快速、高效、平稳地传输。

In order to realize fast and stable transmission of wafers,a new end-effector structure is designed by topology optimization.Firstly,3D UG software is used to model the end-effector of the wafer transfer robot.The static simulation of the endeffector is carried out with ANSYS,and the simulation results are analyzed.Then the topological optimization is carried out to calculate the new end-effector structure and establish a new model.Finally,the static simulation and dynamic modal simulation of the new end-effector are carried out with ANSYS to verify the rationality of the mechanical structure.The results show that the endeffector of the new structure is of less material,less deformation and stress,and the natural frequency meets the requirements.