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多弧离子镀制备多层TiAlCrN涂层的性能研究 被引量:5

Study on Properties of TiAlCrN Nano-multilayer Coating by Cathodic Arc Method
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摘要 利用多弧离子镀技术,采用TiAl和AlCr合金靶材在硬质合金基体上交替沉积制备TiAlCrN纳米多层涂层,同时采用TiAlCr合金靶制备了单层TiAlCrN涂层进行性能对比。借助扫描电子显微镜(SEM)、透射电镜(TEM)和X射线能谱分析法(EDS)分析了涂层的微观结构及成分,利用划痕法和纳米压痕法测试了涂层的结合力与纳米硬度,最后搭配硬质合金铣刀片测试了两种涂层在模具钢铣削上的性能表现。结果表明,TiAlCrN纳米多层涂层结构致密,多层层间界面清晰平整,涂层结合力优异,涂层硬度高达33.1GPa。在铣削合金钢方面,TiAlCrN纳米多层涂层的切削寿命较TiAlCrN单层涂层提升40%以上,铣削性能优异。 TiAlCrN nano-multilayer coating is prepared by alternating deposition of TiAl and AlCr alloy cathodes on cemented carbide substrates by cathodic arc evaporation.Meanwhile,TiAlCrN monolayer coating is prepared by using TiAlCr alloy target to compare the properties.The microstructure is investigated by SEM and TEM,the composition of coating is analyzed by energy dispersive spectrometry(EDS),the adhesion is evaluated by scratch tests,and the hardness of the coatings is obtained by nanoindentation.The results show that TiAlCrN nano multilayer coating has a dense structure,a clear and flat interface between layers,and excellent adhesion and coating hardness up to 33.1 GPa.In addition,the TiAlCrN nano-multilayer coating has an excellent cutting performance in milling,the cutting life of TiAlCrN nano-multilayer coating in steel milling is increased by more than 40%compared with TiAlCrN monolayer coating.
作者 赵晓晓 Zhao Xiaoxiao(Xiamen Golden Egret Special Alloy Co.,Ltd.,Xiamen,Fujian 361100,China)
出处 《工具技术》 北大核心 2021年第4期38-41,共4页 Tool Engineering
关键词 TiAlCrN 纳米多层涂层 多弧离子镀 铣削 TiAlCrN nano-multilayer cathodic arc milling
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