一种非谐振式MEMS电磁能量收集器

Non-Resonant MEMS Electromagnetic Energy Harvester

介绍了一种新型非谐振式微电子机械系统(MEMS)电磁振动能量采集器的设计、微加工和表征测试。该能量收集器由MEMS结构、线圈、小型化NdFeB磁体和陶瓷基板组成。建立结构模型对结构固有频率、位移和应力进行仿真。利用MEMS技术制备能量收集器结构和Al线圈等关键部件,并结合嵌有永磁体的陶瓷基板进行组装,在组装过程中使用Cu/Sn倒装焊键合技术将陶瓷与芯片互连,成功制备出能量收集器原理样机。利用振动台对样机性能进行测试,测试结果表明,实际加工能量收集器的谐振频率为5241Hz,在1m/s^(2)固定加速度以及7Hz振动频率条件下,经电路100倍放大测得该能量收集器最大输出电压为257mV。

The design,micro-machining and characterization test of a new type non-resonant micro-electromechanical system(MEMS)electromagnetic vibration energy harvester were intro-duced.The energy harvester was composed of MEMS structure,coil,miniaturized Nd Fe Bma g-net and ceramic substrate.A structural model was established to simulate the natural frequency,displacement and stress of the structure.And the energy harvester structure and Al coils and other key components were prepared by MEMS technology,and the package was com-pleted by combining with the ceramic substrate embedded with permanent magnets.The Cu/Sn flip-chip bonding technology was used for interconnection of ceramic substrate and chip in the as-sembly process,and the prototype of the energy harvester was successfully prepared.Finally,a vibration table was used to test the performance of the prototype.The test results show that the resonance frequency of the actual processed energy harvester is 5241 Hz.Under the conditions of a fixed acceleration of 1 m/s^(2) and a vibration frequency of 7 Hz,the maximum output voltage of the energy harvester is 257 mV after 100 times amplification of the circuit.