低介电常数钒酸盐微波介质陶瓷的研究进展

Research Progress of Vanadate Microwave Dielectric Ceramics with Low Dielectric Constant

当前,低介电常数、高品质因数的新型微波介质陶瓷的开发成为介质材料研究的主流热点,同时,低温共烧陶瓷技术是当前市场中元器件集成的主要方式,这意味着微波介质陶瓷需要有较低的烧结温度。钒酸盐系列物质微波性能优异、烧结温度较低,并与电极材料有良好的化学兼容性,因此受到广泛的关注。概述了VO_(4)系列、石榴石结构系列、AB_(n)VO_(6)系列、A_(2)V_(2)O_(7)系列等低介电常数钒酸盐微波介质陶瓷材料体系的研究进展,并指出了其存在的问题。

At present,the development of new microwave dielectric ceramics with low dielectric constant and high quality factor has become the mainstream in the research of dielectric materials.At the same time,low temperature co-firing ceramic(LTCC)technology is the main way of component integration in the current market,which means that microwave dielectric ceramics need to have a lower sintering temperature.Vanadate has been widely concerned because of its excellent microwave performance,low sintering temperature and good chemical compatibility with electrode materials.In this paper,the research progress of vanadate microwave dielectric ceramics with low dielectric constant,such as VO_(4)series,garnet structure series,AB_(n)VO_(6)series and A_(2)V_(2)O_(7)series are summarized,and the existing problems are pointed out.