氧化铝陶瓷表面连续导电金膜的制备工艺及性能

Preparation Process and Performance of Continuous Conductive Au Film on Surface of Al_(2)O_(3) Ceramic

以Al_(2)O_(3)陶瓷作为基底,采用磁控溅射和丝网印刷两种工艺在其表面制备导电Au膜,并通过控制变量法制备不同参数下不同厚度的Au膜,对两种制备工艺进行了系统性的深入研究。通过高精度电阻测量仪、扫描电子显微镜(SEM)、能谱仪(EDS)分析热处理前后Au膜的导电性能及微观形貌,采用激光共聚焦显微镜(CLSM)表征Au膜表面的粗糙度。结果表明:磁控溅射制备的纳米Au膜的导电膜厚阈值为30 nm,膜层对基底面粗糙度改变较小。对纳米Au膜进行600℃热处理后,Au发生固态润湿,导致电阻值急剧增大,导电性能下降。借助丝网印刷工艺,采用40%(质量分数)的金浆和200目丝网即可印刷得到导电性良好的Au膜,该工艺能够有效节约成本和金浆。

Two methods of magnetron sputtering and screen printing were used to prepare conductive Au films on the Al_(2)O_(3)ceramics surface.Under different parameters,Au films with different thicknesses were prepared by the controlled variable method.A systematic and in-depth study of the two preparation processes was carried out.Through the high-precision resistance measuring instrument,scanning electron microscope(SEM),and energy dispersive spectrometer(EDS),the conductive properties and micro-morphology of Au film before and after heat treatment were studied.The roughness of Au film surface was characterized by Confocal laser scanning microscope(CLSM).The results show that the nano-Au prepared by magnetron sputtering has a conductive film thickness threshold of 30 nm,and its film has a small change in the roughness of the substrate surface.After the nano-Au film is heat-treated at 600℃,Au undergoes solid state wetting,resulting in a sharp increase in its resistance value and a decrease in its electrical conductivity.By the method of screen printing,the conductive Au film is obtained by screen printing with a 200-mesh and the Au content of 40 wt%,and the cost can be significantly reduced.